Sensors and Actuators · 1988 · 119 citations · 3 references
EngineeringDiagnostic DeviceMicrofabricationGas SensorBioelectronicsAnalytical MicrosystemsSilicon WaferLaboratory MedicineLab-on-a-chipBiomedical EngineeringInstrumentationElectronic InstrumentationMicrofluidicsMicroelectronics
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Field Assisted Glass-Metal Sealing
George Wallis, D. Pomerantz · Journal of Applied Physics · 1969 · 726 citations
Tadayuki Matsuo, M. Esashi · Sensors and Actuators · 1981 · 342 citations