Concepedia
Sensors and Actuators · 1981 · 343 citations · 11 references
EngineeringElectrical EngineeringMicrofabricationMicrowave EngineeringSemiconductor DevicesFabrication MaterialsIntegrated Circuit FabricationMems FabricationMicrofabrication ProcessesSemiconductor Device MaterialsFabricationFabrication ProcessesTop-down Fabrication
11
Development, Operation, and Application of the Ion-Sensitive Field-Effect Transistor as a Tool for Electrophysiology
Piet Bergveld · IEEE Transactions on Biomedical Engineering · 1972 · 646 citations
Engineering, Bioengineering, Electrical Engineering +17
A Water-Amine-Complexing Agent System for Etching Silicon
R. M. Finne, D. L. Klein · Journal of The Electrochemical Society · 1967 · 309 citations
Engineering, Materials Engineering, Materials Science +17
Potassium ion-sensitive field effect transistor
Stanley D. Moss, Curtis C. Johnson · Analytical Chemistry · 1975 · 235 citations
Engineering, Chemistry, Electrical Engineering +5
An Integrated Field-Effect Electrode for Biopotential Recording
Tadayuki Matsuo, Kensall D. Wise · IEEE Transactions on Biomedical Engineering · 1974 · 233 citations
Engineering, Bioengineering, Biomedical Engineering +17
Integrated Micro Multi Ion Sensor Using Field Effect of Semiconductor
Masayoshi Esashi, Tadayuki Matsuo · IEEE Transactions on Biomedical Engineering · 1978 · 200 citations
Engineering, Biomedical Engineering, Chemistry +11