Publication | Closed Access
Deep dry etching of borosilicate glass using SF6 and SF6/Ar inductively coupled plasmas
153
Citations
20
References
2005
Year
Materials EngineeringMaterials ScienceGlass-ceramicEngineeringMicrofabricationOptical PropertiesOptical GlassSurface ScienceApplied PhysicsFunctional GlassDeep Dry EtchingPlasma EtchingPlasma ProcessingBorosilicate Glass
| Year | Citations | |
|---|---|---|
Page 1
Page 1