Deep dry etching of borosilicate glass using SF6 and SF6/Ar inductively coupled plasmas

Handbook of X-Ray Photoelectron Spectroscopy

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Microscopic uniformity in plasma etching

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Deep reactive ion etching of Pyrex glass using SF6 plasma

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Engineering, Materials Engineering, Materials Science +13

Conductance considerations in the reactive ion etching of high aspect ratio features

J. W. Coburn, Harold F. Winters · Applied Physics Letters · 1989 · 187 citations

Engineering, Materials Engineering, Materials Science +14

Fabrication of high-density electrical feed-throughs by deep-reactive-ion etching of Pyrex glass

X. Li, Takashi Abe, Y. Liu et al. · Journal of Microelectromechanical Systems · 2002 · 139 citations · Full text

Engineering, Materials Engineering, Materials Science +15