D. J. Vitkavage

Microscopic uniformity in plasma etching

Richard A. Gottscho, C. W. Jurgensen, D. J. Vitkavage · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 615 citations

Engineering, Electrical Engineering, Materials Science +17

Doping reaction of PH3 and B2H6 with Si(100)

Ming L. Yu, D. J. Vitkavage, B.S. Meyerson · Journal of Applied Physics · 1986 · 140 citations

Natural Sciences, Chemistry, Materials Science +17

GaAs MIS structures with SiO ₂ using a thin silicon interlayer

G. G. Fountain, S. V. Hattangady, D. J. Vitkavage et al. · Electronics Letters · 1988 · 66 citations

Engineering, Electrical Engineering, Materials Science +17

Sputtering of chlorinated silicon surfaces studied by secondary ion mass spectrometry and ion scattering spectroscopy

E. L. Barish, D. J. Vitkavage, T. M. Mayer · Journal of Applied Physics · 1985 · 35 citations

Natural Sciences, Materials Engineering, Materials Science +17

Residue formation on Si surfaces in a CHF3 discharge environment

D. J. Vitkavage, T. M. Mayer · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1986 · 24 citations

Natural Sciences, Materials Engineering, Materials Science +17