Deep reactive ion etching of Pyrex glass using SF6 plasma

Review of inductively coupled plasmas for plasma processing

Jeffrey Hopwood · Plasma Sources Science and Technology · 1992 · 678 citations

Natural Sciences, Electrical Engineering, Physics +17

Deep wet etching of borosilicate glass using an anodically bonded silicon substrate as mask

Thierry Corman, Peter Enoksson, Göran Stemme · Journal of Micromechanics and Microengineering · 1998 · 105 citations

Engineering, Electrical Engineering, Materials Engineering +15

Encapsulated micro mechanical sensors

Masayoshi Esashi · Microsystem Technologies · 1994 · 68 citations

Engineering, Materials Science, Mechanical Engineering +11

Non-traditional technologies for microfabrication

Paolo Dario, Maria Chiara Carrozza, N Croce et al. · Journal of Micromechanics and Microengineering · 1995 · 56 citations

Engineering, Electrical Engineering, Manufacturing Engineering +16

Characterization of reactive ion etching of glass and its applications in integrated optics

Ronggui Shen, Giancarlo C. Righini · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1991 · 55 citations

Natural Sciences, Materials Engineering, Materials Science +16