Concepedia

Thierry Corman

TC

8

Publications

271

Citations

8

H-Index

1997

Active since

Affiliations

KTH Royal Institute of Technology(Current)

Thierry Corman is an author at KTH Royal Institute of Technology specializing in engineering, microfabrication, and instrumentation.

Top concepts

EngineeringMicrofabricationApplied PhysicsInstrumentationSensor TechnologySensorsSensor DesignMicroelectronicsBiomedical SensorsBiomedical Engineering

Publications per year

1997–2000

8

Publications

8

Deep wet etching of borosilicate glass using an anodically bonded silicon substrate as mask

Thierry Corman, Peter Enoksson, Göran Stemme · Journal of Micromechanics and Microengineering · 1998 · 105 citations

Materials Engineering, Materials Science, Glass-ceramic +13

Gas damping of electrostatically excited resonators

Thierry Corman, Peter Enoksson, Göran Stemme · Sensors and Actuators A Physical · 1997 · 52 citations

Aeroacoustics, Engineering, Physics +5

Low-pressure-encapsulated resonant structures with integrated electrodes for electrostatic excitation and capacitive detection

Thierry Corman, Peter Enoksson, Göran Stemme · Sensors and Actuators A Physical · 1998 · 41 citations

Electroactive Material, Electrical Engineering, Electrostatic Excitation +8

A low-pressure encapsulated resonant fluid density sensor with feedback control electronics

Thierry Corman, Peter Enoksson, Kjell Norén et al. · Measurement Science and Technology · 2000 · 23 citations

Feedback Control Electronics, Biomedical Sensors, Engineering +15

An optical IR-source and CO/sub 2/-chamber system for CO/sub 2/ measurements

Thierry Corman, Edvard Kälvesten, M. Huiku et al. · Journal of Microelectromechanical Systems · 2000 · 16 citations

Ir Sources, Co/sub 2/-Chamber System, Engineering +22

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