In situ friction and wear measurements in integrated polysilicon mechanisms

Laterally Driven Polysilicon Resonant Microstructures

William C. Tang, Tu-Cuong H. Nguyen, Roger T. Howe · Sensors and Actuators · 1989 · 737 citations

Engineering, Materials Engineering, Materials Science +6

IC-processed electrostatic micromotors

Long-Shen Fan, Yu‐Chong Tai, R.S. Muller · Sensors and Actuators · 1989 · 488 citations

Integrated movable micromechanical structures for sensors and actuators

L.-S. Fan, R.S. Muller · IEEE Transactions on Electron Devices · 1988 · 296 citations

Engineering, Materials Science, Mechanical Engineering +17

Integrated fabrication of polysilicon mechanisms

Mehran Mehregany, K.J. Gabriel, William S. Trimmer · IEEE Transactions on Electron Devices · 1988 · 226 citations

Engineering, Mechanical Engineering, Robotics Engineering +17

Normally closed microvalve and mircopump fabricated on a silicon wafer

Masayoshi Esashi, Shuichi Shoji, Akira Nakano · Sensors and Actuators · 1989 · 152 citations

Engineering, Electrical Engineering, Materials Science +12