A new processing technique to prevent stiction using silicon selective etching for SOI-MEMS

Mechanical stability and adhesion of microstructures under capillary forces. I. Basic theory

Carlos H. Mastrangelo, C.H. Hsu · Journal of Microelectromechanical Systems · 1993 · 488 citations

Engineering, Materials Engineering, Materials Science +17

Comparative evaluation of drying techniques for surface micromachining

Chang‐Jin Kim, John Y. Kim, Balaji Sridharan · Sensors and Actuators A Physical · 1998 · 108 citations

Engineering, Manufacturing Engineering, Materials Engineering +12

Self-Assembled Monlayer Films as Durable Anti-Stiction Coating for Polysilicon Microstructures

M.R. Houston, Roya Maboudian, Roger T. Howe · 1996 · 59 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Photoresist-Assisted Release of Movable Microstructures

D. Kobayashi, Chang‐Jin Kim, Hiroyuki Fujita · Japanese Journal of Applied Physics · 1993 · 58 citations

Engineering, Materials Engineering, Materials Science +17

Characterization of anhydrous HF gas-phase etching with CH3OH for sacrificial oxide removal

Jong‐Hyun Lee, Won Ick Jang, Chang Seung Lee et al. · Sensors and Actuators A Physical · 1998 · 35 citations

Natural Sciences, Materials Engineering, Materials Science +13