Concepedia

Stiction Mitigation

Stiction Mitigation is a microfabrication strategy within surface micromachining that employs a sacrificial layer processing technique to reduce adhesive forces between microstructure surfaces, thereby preventing permanent adhesion in MEMS switches and actuators during release and operational phases.

60

Publications

2.9K

Citations

216

Authors

73

Institutions

Publications per year

2017–2026

3

Parents

Publications

60

Stiction in surface micromachining

Niels R. Tas, T. Sonnenberg, Henri Jansen et al. · Journal of Micromechanics and Microengineering · 1996 · 544 citations · Full text

, , +16

Adhesion and stiction: Mechanisms, measurement techniques, and methods for reduction

Bharat Bhushan · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 484 citations

, , +16

Vapor phase anti-stiction coatings for MEMS

W. Robert Ashurst, Carlo Carraro, Roya Maboudian · IEEE Transactions on Device and Materials Reliability · 2003 · 117 citations

, , +17

On the physics of stiction and its impact on the reliability of microstructures

W. Merlijn van Spengen, Robert Puers, Ingrid De Wolf · Journal of Adhesion Science and Technology · 2003 · 109 citations

, , +16

Wafer level anti-stiction coatings for MEMS

W. Robert Ashurst, Carlo Carraro, Roya Maboudian et al. · Sensors and Actuators A Physical · 2003 · 105 citations

, , +12

1–5 of 60

Authors

216

  1. RM
    Roya Maboudian

    University of California, Berkeley, United States

    3 publications · 281 citations

    3

    h-index

  2. BB
    Bharat Bhushan

    The Ohio State University, United States

    3 publications · 593 citations

    3

    h-index

  3. CC
    Carlo Carraro

    University of California, Berkeley, United States

    2 publications · 222 citations

    2

    h-index

  4. WR
    W. Robert Ashurst

    Auburn University, United States

    2 publications · 222 citations

    2

    h-index

  5. RR
    Raghunathan Rengaswamy

    Indian Institute of Technology Madras, India

    2 publications · 97 citations

    2

    h-index

1–5 of 216

Institutions

73

  1. University of California, Berkeley

    Berkeley, United States

    5 h-index

    15 publications

    1.1K citations

  2. Seoul National University

    Seoul, South Korea

    3 h-index

    11 publications

    334 citations

  3. The Ohio State University

    Columbus, United States

    3 h-index

    6 publications

    778 citations

  4. Harvard University

    Cambridge, United States

    2 h-index

    12 publications

    252 citations

  5. Shanghai Jiao Tong University

    Shanghai, China

    2 h-index

    5 publications

    73 citations

  6. Seagate (United States)

    Cupertino, United States

    2 h-index

    17 publications

    511 citations

  7. Massachusetts Institute of Technology

    Cambridge, United States

    2 h-index

    6 publications

    126 citations

  8. National University of Singapore

    Singapore, Singapore

    2 h-index

    6 publications

    192 citations

1–8 of 73

Venues

  1. Journal of Microelectromechanical Systems

    6 publications · 224 citations

    6

    h-index

  2. Sensors and Actuators A Physical

    5 publications · 214 citations

    5

    h-index

  3. Journal of Micromechanics and Microengineering

    JMM · 4 publications · 616 citations

    4

    h-index

  4. Industrial & Engineering Chemistry Research

    3 publications · 93 citations

    3

    h-index

  5. IEEE Transactions on Magnetics

    3 publications · 77 citations

    3

    h-index

1–5