Comparative evaluation of drying techniques for surface micromachining

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Mechanical stability and adhesion of microstructures under capillary forces. II. Experiments

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Stiction of surface micromachined structures after rinsing and drying: model and investigation of adhesion mechanisms

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The effect of release-etch processing on surface microstructure stiction

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Dry release for surface micromachining with HF vapor-phase etching

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