Concepedia

Multilayer Surface Micromachining

Multilayer Surface Micromachining is a surface micromachining technique that integrates multiple structural and sacrificial layers in a vertically stacked configuration to enable the fabrication of complex, three-dimensional microelectromechanical systems (MEMS) devices with enhanced functionality and mechanical performance.

16

Publications

997

Citations

44

Authors

20

Institutions

Publications per year

2017–2026

1

Parents

Publications

16

Surface processes in MEMS technology

Roya Maboudian · Surface Science Reports · 1998 · 277 citations

, , +12

Microelectromechanical deformable mirrors

Thomas G. Bifano, Julie A. Perreault, Raji Krishnamoorthy Mali et al. · IEEE Journal of Selected Topics in Quantum Electronics · 1999 · 180 citations

, , +17

Comparative evaluation of drying techniques for surface micromachining

Chang‐Jin Kim, John Y. Kim, Balaji Sridharan · Sensors and Actuators A Physical · 1998 · 108 citations

, , +12

Microelectromechanical Devices for Satellite Thermal Control

Robert Osiander, Samara L. Firebaugh, John L. Champion et al. · IEEE Sensors Journal · 2004 · 91 citations

, , +15

Recent developments and research challenges in electrochemical micromachining (µECM)

Alexandre Spieser, Atanas Ivanov · The International Journal of Advanced Manufacturing Technology · 2013 · 90 citations

, , +16

1–5 of 16

Authors

44

  1. MM
    Mehran Mehregany

    Case Western Reserve University, United States

    3 publications · 94 citations

    3

    h-index

  2. CA
    Christian A. Zorman

    Case Western Reserve University, United States

    3 publications · 94 citations

    3

    h-index

  3. RK
    Raji Krishnamoorthy Mali

    Boston University, United States

    2 publications · 191 citations

    2

    h-index

  4. AY
    A.A. Yasseen

    Case Western Reserve University, United States

    2 publications · 70 citations

    2

    h-index

  5. TG
    Thomas G. Bifano

    Boston University, United States

    2 publications · 191 citations

    2

    h-index

1–5 of 44

Institutions

20

  1. Case Western Reserve University

    Cleveland, United States

    3 h-index

    11 publications

    352 citations

  2. Boston University

    Boston, United States

    2 h-index

    6 publications

    742 citations

  3. University of California, Berkeley

    Berkeley, United States

    1 h-index

    1 publications

    277 citations

  4. Uppsala University

    Uppsala, Sweden

    1 h-index

    1 publications

    10 citations

  5. The University of Western Australia

    Perth, Australia

    1 h-index

    3 publications

    42 citations

  6. California Institute of Technology

    Pasadena, United States

    1 h-index

    2 publications

    32 citations

  7. University of Twente

    Enschede, The Netherlands

    1 h-index

    4 publications

    40 citations

  8. Doheny Eye Institute

    Los Angeles, United States

    1 h-index

    1 publications

    16 citations

1–8 of 20

Venues

  1. Journal of Micromechanics and Microengineering

    JMM · 2 publications · 21 citations

    2

    h-index

  2. Journal of Microelectromechanical Systems

    2 publications · 28 citations

    2

    h-index

  3. Sensors and Actuators A Physical

    2 publications · 129 citations

    2

    h-index

  4. 1

    h-index

  5. IEEE Sensors Journal

    1 publications · 91 citations

    1

    h-index

1–5