Concepedia

Stiction Reduction

Stiction Reduction is a MEMS design methodology that mitigates the unintended adhesion between microscale surfaces caused by intermolecular forces, thereby enhancing the reliability and functionality of microelectromechanical systems.

74

Publications

4.3K

Citations

230

Authors

86

Institutions

Publications per year

2017–2026

5

Parents

Publications

74

Stiction in surface micromachining

Niels R. Tas, T. Sonnenberg, Henri Jansen et al. · Journal of Micromechanics and Microengineering · 1996 · 544 citations · Full text

, , +16

Adhesion and stiction: Mechanisms, measurement techniques, and methods for reduction

Bharat Bhushan · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 484 citations

, , +16

Alkyltrichlorosilane-based self-assembled monolayer films for stiction reduction in silicon micromachines

U. Srinivasan, M.R. Houston, Roger T. Howe et al. · Journal of Microelectromechanical Systems · 1998 · 425 citations

, , +17

Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developments

Roya Maboudian, W. Robert Ashurst, Carlo Carraro · Sensors and Actuators A Physical · 2000 · 377 citations

, , +15

AFM study of perfluoroalkylsilane and alkylsilane self-assembled monolayers for anti-stiction in MEMS/NEMS

Bharat Bhushan, Toshi Kasai, G. Kulik et al. · Ultramicroscopy · 2005 · 144 citations

, , +14

1–5 of 74

Authors

230

  1. RM
    Roya Maboudian

    University of California, Berkeley, United States

    8 publications · 1.3K citations

    8

    h-index

  2. WR
    W. Robert Ashurst

    Auburn University, United States

    4 publications · 645 citations

    4

    h-index

  3. CC
    Carlo Carraro

    University of California, Berkeley, United States

    4 publications · 645 citations

    4

    h-index

  4. MH
    M.R. Houston

    University of California, Berkeley, United States

    3 publications · 539 citations

    3

    h-index

  5. BB
    Bharat Bhushan

    The Ohio State University, United States

    3 publications · 661 citations

    3

    h-index

1–5 of 230

Institutions

86

  1. University of California, Berkeley

    Berkeley, United States

    9 h-index

    24 publications

    3.9K citations

  2. The Ohio State University

    Columbus, United States

    3 h-index

    5 publications

    838 citations

  3. Korea Advanced Institute of Science and Technology

    Daejeon, South Korea

    3 h-index

    7 publications

    200 citations

  4. Nanyang Technological University

    Singapore, Singapore

    3 h-index

    8 publications

    314 citations

  5. University of California, Los Angeles

    Los Angeles, United States

    3 h-index

    7 publications

    194 citations

  6. Instituto Federal do Espírito Santo

    Vitória, Brazil

    2 h-index

    4 publications

    152 citations

  7. Electronics and Telecommunications Research Institute

    Daejeon, South Korea

    2 h-index

    9 publications

    628 citations

  8. Singapore Science Park

    Singapore, Singapore

    2 h-index

    3 publications

    78 citations

1–8 of 86

Venues

  1. Sensors and Actuators A Physical

    7 publications · 573 citations

    7

    h-index

  2. Journal of Microelectromechanical Systems

    6 publications · 714 citations

    7

    h-index

  3. Journal of Micromechanics and Microengineering

    JMM · 6 publications · 704 citations

    6

    h-index

  4. 3

    h-index

  5. Industrial & Engineering Chemistry Research

    3 publications · 174 citations

    3

    h-index

1–5