Concepedia

Toshi Kasai

TK

Statistics

Publications

6

Citations

448

H-Index

6

Active since

2004

Affiliations

The Ohio State University(Current)

École Polytechnique Fédérale de Lausanne

Cabot Microelectronics (United States)

Toshi Kasai is an author at The Ohio State University specializing in materials science, surface science, and materials engineering.

Publications per year

2004–2008

6

Publications

6

AFM study of perfluoroalkylsilane and alkylsilane self-assembled monolayers for anti-stiction in MEMS/NEMS

Bharat Bhushan, Toshi Kasai, G. Kulik et al. · Ultramicroscopy · 2005 · 144 citations

Engineering, Materials Engineering, Materials Science +14

Micro∕nanotribological study of perfluorosilane SAMs for antistiction and low wear

Toshi Kasai, Bharat Bhushan, G. Kulik et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 86 citations

Natural Sciences, Materials Engineering, Materials Science +17

Topography and phase imaging using the torsional resonance mode

Toshi Kasai, Bharat Bhushan, Lin Huang et al. · Nanotechnology · 2004 · 65 citations

Natural Sciences, Materials Engineering, Materials Science +17

A kinematic analysis of disk motion in a double sided polisher for chemical mechanical planarization (CMP)

Toshi Kasai · Tribology International · 2007 · 52 citations

Engineering, Materials Engineering, Materials Science +12

A surface topography-independent friction measurement technique using torsional resonance mode in an AFM

Bharat Bhushan, Toshi Kasai · Nanotechnology · 2004 · 52 citations

Natural Sciences, Materials Science, Mechanical Engineering +17

1–5 of 6