Toshi Kasai - Concepedia

Author

Toshi Kasai

Also Known As

Toshi Kasai

Publications

456

Citations

H-Index

Concepts

All Affiliations

Toshi Kasai is an author at The Ohio State University specializing in microfabrication, engineering, and materials science.

#	Concept	H-Index	Publications	Citations
1	Engineering	6	6	446
2	Applied Physics	4	4	345
3	Education	1	1	51
4	Health Sciences	1	1	64
5	Natural Sciences	1	1	144

Toshi Kasai

Publications

446

Citations

H-Index

Page 1

	Year	Citations
AFM study of perfluoroalkylsilane and alkylsilane self-assembled monolayers for anti-stiction in MEMS/NEMS Bharat Bhushan, Toshi Kasai, G. Kulik, Ultramicroscopy Materials ScienceEngineeringSurface FunctionalizationMicrofabricationNanotechnology	2005	144
Micro∕nanotribological study of perfluorosilane SAMs for antistiction and low wear Toshi Kasai, Bharat Bhushan, G. Kulik, Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena Materials EngineeringMaterials ScienceLow WearMicro∕nanoelectromechanical SystemsEngineering	2005	86
Topography and phase imaging using the torsional resonance mode Toshi Kasai, Bharat Bhushan, Lin Huang, Nanotechnology High ResolutionEngineeringMicroscopyMechanical EngineeringTorsional Resonance Mode	2004	64
A kinematic analysis of disk motion in a double sided polisher for chemical mechanical planarization (CMP) Toshi Kasai Tribology International Materials ScienceDouble Sided PolisherEngineeringMaterial ProcessingMicrofabrication	2007	52
A surface topography-independent friction measurement technique using torsional resonance mode in an AFM Bharat Bhushan, Toshi Kasai Nanotechnology EngineeringMeasurementMicroscopyMechanical EngineeringEducation	2004	51
Physics and tribology of chemical mechanical planarization Toshi Kasai, Bharat Bhushan Journal of Physics Condensed Matter Tribological CoatingEngineeringMechanical EngineeringNanotribologyMaterial Processing	2008	49

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