Publication | Closed Access
AFM study of perfluoroalkylsilane and alkylsilane self-assembled monolayers for anti-stiction in MEMS/NEMS
144
Citations
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References
2005
Year
Materials ScienceEngineeringSurface FunctionalizationMicrofabricationNanotechnologySelf-assemblySurface ScienceApplied PhysicsMolecular Self-assemblyNatural SciencesChemistryAfm StudyMolecule-based MaterialAlkylsilane Self-assembled Monolayers
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