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A kinematic analysis of disk motion in a double sided polisher for chemical mechanical planarization (CMP)

Materials ScienceDouble Sided PolisherEngineeringMaterial ProcessingMicrofabricationMechanicsMaterial MachiningMechanical EngineeringTool WearMechanical SystemsMachine ToolDisk MotionManufacturing EngineeringComputational MechanicsChemical Mechanical Planarization3D Printing