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Characterization of anhydrous HF gas-phase etching with CH3OH for sacrificial oxide removal

DOI

35

Citations

13

References

1998

Year

Jong‐Hyun Lee, Won Ick Jang, Chang Seung Lee, Yong Il Lee, Chang-Auk Choi, Jong Tae Baek, Hyung Joun Yoo
Sensors and Actuators A Physical

References

YearCitations

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