Characterization of anhydrous HF gas-phase etching with CH3OH for sacrificial oxide removal

Handbook of chemistry and physics

Journal of the Franklin Institute · 1930 · 11.7K citations

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Mechanical stability and adhesion of microstructures under capillary forces. I. Basic theory

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Stiction of surface micromachined structures after rinsing and drying: model and investigation of adhesion mechanisms

R. Legtenberg, H.A.C. Tilmans, J. Elders · Sensors and Actuators A Physical · 1994 · 202 citations · Full text

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Fabrication of micromechanical devices from polysilicon films with smooth surfaces

H. Guckel, J.J. Sniegowski, Todd R. Christenson et al. · Sensors and Actuators · 1989 · 176 citations

Engineering, Materials Engineering, Materials Science +13

Polysilicon microgripper

Chang‐Jin Kim, Albert P. Pisano, R.S. Muller et al. · Sensors and Actuators A Physical · 1992 · 121 citations

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