Yong Il Lee

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Active since

1998

Affiliations

Electronics and Telecommunications Research Institute(Current)

Yong Il Lee is an author at Electronics and Telecommunications Research Institute specializing in surface science, oxide removal, and materials science.

Publications per year

1998–2002

Publications

Characterization of anhydrous HF gas-phase etching with CH3OH for sacrificial oxide removal

Jong‐Hyun Lee, Won Ick Jang, Chang Seung Lee et al. · Sensors and Actuators A Physical · 1998 · 35 citations

Natural Sciences, Materials Engineering, Materials Science +13

Gas-phase etching of sacrificial oxides using anhydrous HF and CH/sub 3/OH

Jong‐Hyun Lee, Yong Il Lee, Won Ick Jang et al. · 2002 · 12 citations

Engineering, Materials Engineering, Materials Science +17

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