Concepedia

Hyung Joun Yoo

HJ

Statistics

Publications

11

Citations

225

H-Index

10

Active since

1989

Affiliations

Electronics and Telecommunications Research Institute(Current)

Hyung Joun Yoo is an author at Electronics and Telecommunications Research Institute specializing in materials science, engineering, and applied physics.

Top concepts

Publications per year

1989–2002

11

Publications

11

Nanometer-scale lithography on H-passivated Si(100) by atomic force microscope in air

Hai Tai Lee, Jae Seuk Oh, Seong-Ju Park et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1997 · 40 citations · Full text

, , +24

Modeling and Characterization of Gas‐Phase Etching of Thermal Oxide and TEOS Oxide Using Anhydrous HF and  CH 3 OH

Chun Su Lee, Jong Tae Baek, Hyung Joun Yoo et al. · Journal of The Electrochemical Society · 1996 · 35 citations

, , +15

Characterization of anhydrous HF gas-phase etching with CH3OH for sacrificial oxide removal

Jong‐Hyun Lee, Won Ick Jang, Chang Seung Lee et al. · Sensors and Actuators A Physical · 1998 · 35 citations

, , +6

Emission characteristics of TiN-coated silicon field emitter arrays

Seung‐Youl Kang, Jin Ho Lee, Yoon‐Ho Song et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 27 citations

, , +8

Growth behavior of copper metalorganic chemical vapor deposition using the (hfac)Cu(VTMOS) precursor on titanium nitride substrates

Chi‐Hoon Jun, Youn Tae Kim, Jong-Tae Baek et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1996 · 18 citations

, , +16

1–5 of 11