Hyung Joun Yoo - Concepedia

Author

Hyung Joun Yoo

Electronics and Telecommunications Research Institute

Also Known As

Hyung Joun Yoo, Hyung Joun Yoo Hyung Joun Yoo, Hyung Joun Yoo Yoo

115

Publications

354

Citations

H-Index

Concepts

All Affiliations

Electronics and Telecommunications Research Institute

About

Hyung Joun Yoo is an author at Electronics and Telecommunications Research Institute specializing in materials science, engineering, and applied physics.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	10	11	225
2	Applied Physics	7	7	155
3	Chemical Engineering	4	4	100
4	Chemistry	4	4	100
5	Electrical Engineering	2	2	41

Hyung Joun Yoo

Publications

225

Citations

H-Index

Page 1

	Year	Citations
Nanometer-scale lithography on H-passivated Si(100) by atomic force microscope in air Hai Tai Lee, Jae Seuk Oh, Seong-Ju Park, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films EngineeringAfm TipMicroscopyMechanical EngineeringSilicon On Insulator	1997	40
Modeling and Characterization of Gas‐Phase Etching of Thermal Oxide and TEOS Oxide Using Anhydrous HF and CH 3 OH Chun Su Lee, Jong Tae Baek, Hyung Joun Yoo, Journal of The Electrochemical Society Materials ScienceChemical EngineeringEngineeringWafer TemperatureOxide Electronics	1996	35
Characterization of anhydrous HF gas-phase etching with CH3OH for sacrificial oxide removal Jong‐Hyun Lee, Won Ick Jang, Chang Seung Lee, Sensors and Actuators A Physical Materials ScienceMaterials EngineeringChemical EngineeringEngineeringSacrificial Oxide Removal	1998	35
Emission characteristics of TiN-coated silicon field emitter arrays Seung‐Youl Kang, Jin Ho Lee, Yoon‐Ho Song, Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena Materials ScienceElectrical EngineeringEngineeringApplied PhysicsTiw Gate Structure	1998	27
Growth behavior of copper metalorganic chemical vapor deposition using the (hfac)Cu(VTMOS) precursor on titanium nitride substrates Chi‐Hoon Jun, Youn Tae Kim, Jong-Tae Baek, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films EngineeringPreferred OrientationChemistryChemical DepositionGrowth Behavior	1996	18
Fabrication and characterization of silicon field emitter arrays with focusing electrode by the chemical mechanical polishing process Jin Ho Lee, Yoon‐Ho Song, Seung‐Youl Kang, Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena Materials ScienceElectrical EngineeringWafer Scale ProcessingEngineeringElectron-beam Lithography	1998	14
Design of illumination system for ArF excimer laser step-and-scanner Kag Hyeon Lee, Dohoon Kim, Jong-Soo Kim, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Optical DesignLithography ToolEngineeringOptic DesignOptical Testing	1998	12
Gas-phase etching of sacrificial oxides using anhydrous HF and CH/sub 3/OH Jong‐Hyun Lee, Yong Il Lee, Won Ick Jang, EngineeringLiquid-liquid FlowMechanical EngineeringCh/sub 3/OhSurface Micromachining	2002	12
Interfacial reaction in the sputter-deposited SiO2/Ti0.1W0.9 antifuse system Jong Tae Baek, Hyung‐Ho Park, Kyung-Ik Cho, Journal of Applied Physics Materials EngineeringMaterials ScienceInterfacial ReactionMaterial AnalysisSio2 Layer	1995	11
Fabrication of surface micromachined polysilicon actuators using dry release process of HF gas-phase etching Jong‐Hyun Lee, Hoi Hwan Chung, Seung Youl Kang, Dry Release ProcessEngineeringMechanical EngineeringPolysilicon Surface MicromachiningMicroactuator	2002	11

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