DC sputter deposition of amorphous indium–gallium–zinc–oxide (a-IGZO) films with H2O introduction

Takafumi Aoi, Nobuto Oka, Yasushi Sato, Ryo Hayashi, Hideya Kumomi, Yuzo Shigesato

Thin Solid Films · 2009 · 49 citations · 11 references

Concepts

References

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