Thin Solid Films · 2009 · 49 citations · 11 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor MaterialsThin FilmsAmorphous MaterialsAmorphous SemiconductorsAmorphous SolidsSemiconductor Thin FilmsThin-film DepositionThin-film MaterialsAmorphous Indium Gallium Zinc OxideAmorphous Semiconductor FilmsAmorphous Thin FilmsSputter DepositionSputtering
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