Takafumi Aoi

DC sputter deposition of amorphous indium–gallium–zinc–oxide (a-IGZO) films with H2O introduction

Takafumi Aoi, Nobuto Oka, Yasushi Sato et al. · Thin Solid Films · 2009 · 49 citations

Materials Science, H2o Introduction, Engineering +10

Electronic State of Amorphous Indium Gallium Zinc Oxide Films Deposited by DC Magnetron Sputtering with Water Vapor Introduction

Nobuto Oka, Takafumi Aoi, Ryo Hayashi et al. · Applied Physics Express · 2012 · 28 citations

Materials Science, Materials Engineering, Chemical Engineering +15

A technique for uniform generation of very-high-frequency plasma suited to large-area thin-film deposition

Hideo Yamakoshi, Koji Satake, Yoshinori Takeuchi et al. · Applied Physics Letters · 2006 · 15 citations

Engineering, Plasma Science, Plasma Physics +21