Publication | Closed Access
Effective baking of thick and ultra-thick photoresist layers by infrared radiation
15
Citations
2
References
2003
Year
Materials ScienceEngineeringInfrared SensorOptical PropertiesMaterials FabricationApplied PhysicsEffective BakingUltra-thick Photoresist LayersInfrared RadiationInfrared OpticPhotopolymer NetworkDepth-graded Multilayer Coating
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