M. Kubenz

Reverse-contact UV nanoimprint lithography for multilayered structure fabrication

N. Kehagias, Vincent Reboud, G. Chansin et al. · Nanotechnology · 2007 · 51 citations

Engineering, Materials Engineering, Materials Science +13

Submicron three-dimensional structures fabricated by reverse contact UV nanoimprint lithography

N. Kehagias, Vincent Reboud, G. Chansin et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2006 · 23 citations

Engineering, Materials Engineering, Materials Science +13

Fast heating and cooling in nanoimprint using a spring-loaded adapter in a preheated press

Helmut Schift, S. Bellini, J. Gobrecht et al. · Microelectronic Engineering · 2007 · 22 citations

Engineering, Materials Engineering, Materials Science +9

Fabrication of Nanoimprint stamps for photonic crystals

Josef Kouba, M. Kubenz, G Ropers et al. · Journal of Physics Conference Series · 2006 · 20 citations · Full text

Engineering, Materials Engineering, Materials Science +12

Effective baking of thick and ultra-thick photoresist layers by infrared radiation

M. Kubenz, Ute Ostrzinski, F. Reuther et al. · Microelectronic Engineering · 2003 · 15 citations

Natural Sciences, Materials Engineering, Materials Science +13