Concepedia

Fast heating and cooling in nanoimprint using a spring-loaded adapter in a preheated press

Helmut Schift, S. Bellini, J. Gobrecht, F. Reuther, M. Kubenz, Morten Bo Mikkelsen, Konrad Vogelsang

Microelectronic Engineering · 2007 · 22 citations · 4 references

DOI

Concepts

References

4

Pattern formation in hot embossing of thin polymer films

Helmut Schift, Laura J. Heyderman, Matthias Auf der Maur et al. · Nanotechnology · 2001 · 137 citations

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Polymer time constants during low temperature nanoimprint lithography

Hella‐Christin Scheer, N. Bogdanski, M. Wissen et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 38 citations

, , +17

Novel linear and crosslinking polymers for nanoimprinting with high etch resistance

K. Pfeiffer, Mathias Fink, G. Bleidießel et al. · Microelectronic Engineering · 2000 · 37 citations

, , +14

A comparison of thermally and photochemically cross-linked polymers for nanoimprinting

K. Pfeiffer, F. Reuther, Mathias Fink et al. · Microelectronic Engineering · 2003 · 36 citations

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