Journal of Applied Physics · 1981 · 29 citations · 8 references
Natural SciencesMaterials EngineeringMaterials ScienceOpticsSemiconductor MaterialsThin FilmsLaser PhysicsOptical Properties Of MaterialsOptical Thin FilmsOptoelectronic MaterialsThin Film AnnealingThin Film Optical PropertiesLaser AnnealingLaser Beam AbsorptionLaser Energy AbsorptionLight AbsorptionMultilayer Thin Film AnnealingPolysiliconSilicon Thin FilmsUltrafast Laser Material Processing
A simple model has been derived, which accounts for the optical effects occurring during the laser processing of stacked thin films and determines the power ratio absorbed by each layer. Experimental data provided by the annealing of a Si-SiO2-polysilicon structure are shown to be in good agreement with theory.
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Optical Properties of Thin Solid Films
O.S. Heavens · 1965 · 1.2K citations
Zdeněk Knittl, Peter H. Berning · Physics Today · 1977 · 481 citations