Intercomparison of scanning probe microscopes

<i>Interferogram Analysis: Digital Fringe Pattern Measurement Techniques</i>

David Robinson, G. T. Reid, Peter J. de Groot · Physics Today · 1994 · 181 citations

Engineering, Biomedical Engineering, Metrology +4

Dimensional metrology with scanning probe microscopes

J. E. Griffith, D. A. Grigg · Journal of Applied Physics · 1993 · 175 citations

Engineering, Materials Engineering, Materials Science +16

Real-time, interferometrically measuring atomic force microscope for direct calibration of standards

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Natural Sciences, Physics, Instrumentation +16

Metrology and properties of engineering surfaces 1988

D.G. Chetwynd · Precision Engineering · 1990 · 97 citations

Engineering, Materials Engineering, Materials Science +12

Industrial Uses of STM and AFM * *Contribution of the National Institute of Standards and Technology. Not subject to copyright except for illustrations taken from other sources.

Theodore V. Vorburger, John A. Dagata, Günter Wilkening et al. · CIRP Annals · 1997 · 61 citations

Engineering, Mechanical Engineering, Metrology +3