Continuous ultraviolet roll nanoimprinting process for replicating large-scale nano- and micropatterns

Suho Ahn, Joowon Cha, Ho Myung, Seok‐min Kim, Shinill Kang

Applied Physics Letters · 2006 · 102 citations · 12 references

Concepts

Abstract

With the increasing demand for large-scale nano- and micropatterns in the field of digital displays, nano- and micropattern replication technology has become a research priority. In this study, a continuous ultraviolet (UV) roll nanoimprinting process using a pattern roll stamper for the replication of large-scale nano- and micropatterns was designed and constructed. Several flexible nano- and micropatterns with large areas were fabricated and analyzed as tests of this continuous UV imprinting process.

References

12