Applied Physics Letters · 2006 · 102 citations · 12 references
EngineeringPattern TransferBiomedical EngineeringBeam LithographyContinuous UltravioletPrinted ElectronicsContinuous Ultraviolet RollPattern Roll StamperNanolithographyNanometrologyBiophysicsNanolithography MethodMaterials ScienceMicropattern Replication TechnologyNanotechnologyNanomanufacturingFabrication Technique3D PrintingNano ScaleFlexible ElectronicsMicrofabricationNanomaterialsApplied PhysicsNanofabrication
With the increasing demand for large-scale nano- and micropatterns in the field of digital displays, nano- and micropattern replication technology has become a research priority. In this study, a continuous ultraviolet (UV) roll nanoimprinting process using a pattern roll stamper for the replication of large-scale nano- and micropatterns was designed and constructed. Several flexible nano- and micropatterns with large areas were fabricated and analyzed as tests of this continuous UV imprinting process.
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