Concepedia

Nanopattern Replication

Nanopattern Replication is a lithographic process that enables the faithful duplication of nanoscale patterns from a master template onto a substrate through mechanical deformation or selective material transfer, distinguishing it from other nanofabrication techniques by its reliance on direct physical molding rather than serial scanning or radiation-based patterning.

77

Publications

3.9K

Citations

343

Authors

118

Institutions

Publications per year

2017–2026

11

Parents

Publications

77

Mold-assisted nanolithography: A process for reliable pattern replication

J. Haisma, M.J. Verheijen, Kees van den Heuvel et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 656 citations

, , +11

Replication of micro and nano surface geometries

Hans Nørgaard Hansen, R.J. Hocken, G. Tosello · CIRP Annals · 2011 · 185 citations

, , +12

Nanopattern Formation from Tethered PS-<i>b</i>-PMMA Brushes upon Treatment with Selective Solvents

Bin Zhao, William J. Brittain, Wensheng Zhou et al. · Journal of the American Chemical Society · 2000 · 177 citations

, , +17

Nanoreplication in polymers using hot embossing and injection molding

Helmut Schift, Christian Dávid, J. Gobrecht et al. · Microelectronic Engineering · 2000 · 163 citations

, , +14

The Pursuit of a Scalable Nanofabrication Platform for Use in Material and Life Science Applications

Stephanie E. A. Gratton, Stuart Williams, Mary E. Napier et al. · Accounts of Chemical Research · 2008 · 141 citations · Full text

, , +17

1–5 of 77

Authors

343

  1. HS
    Helmut Schift

    Paul Scherrer Institute, Switzerland

    5 publications · 276 citations

    5

    h-index

  2. JG
    J. Gobrecht

    Paul Scherrer Institute, Switzerland

    4 publications · 246 citations

    4

    h-index

  3. SK
    Shinill Kang

    Yonsei University, South Korea

    3 publications · 147 citations

    3

    h-index

  4. KN
    Keisuke Nagato

    The University of Tokyo, Japan

    3 publications · 42 citations

    3

    h-index

  5. MM
    Maria Matschuk

    Technical University of Denmark, Denmark

    3 publications · 155 citations

    3

    h-index

1–5 of 343

Institutions

118

  1. Paul Scherrer Institute

    Villigen, Switzerland

    5 h-index

    17 publications

    1.2K citations

  2. Technical University of Denmark

    Kongens Lyngby, Denmark

    5 h-index

    16 publications

    943 citations

  3. The University of Tokyo

    Tokyo, Japan

    3 h-index

    10 publications

    132 citations

  4. Yonsei University

    Seoul, South Korea

    3 h-index

    15 publications

    709 citations

  5. Ørsted (Denmark)

    Fredericia, Denmark

    3 h-index

    7 publications

    350 citations

  6. Beijing National Laboratory for Molecular Sciences

    Beijing, China

    2 h-index

    9 publications

    539 citations

  7. Cardiff University

    Cardiff, United Kingdom

    2 h-index

    3 publications

    73 citations

  8. State Key Laboratory for Structural Chemistry of Unstable and Stable Species

    Beijing, China

    2 h-index

    9 publications

    539 citations

1–8 of 118

Venues

  1. Journal of Micromechanics and Microengineering

    JMM · 7 publications · 195 citations

    7

    h-index

  2. Microelectronic Engineering

    6 publications · 317 citations

    6

    h-index

  3. Small

    5 publications · 118 citations

    5

    h-index

  4. 4

    h-index

  5. Applied Physics Letters

    4 publications · 247 citations

    4

    h-index

1–5