Concepedia
Journal of Electronic Materials · 2012 · 58 citations · 25 references
Materials ScienceMaterials EngineeringAluminium NitrideEngineeringMechanical EngineeringApplied PhysicsSurface ScienceSubstrate TemperatureDeposition RateChemical Vapor DepositionThin FilmsChemical DepositionReactive MagnetronThin Film ProcessingMicrostructure
25
Thin film resonator technology
K.M. Lakin · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 2005 · 221 citations
Materials Science, Electrical Engineering, Engineering +14
The influence of sputter deposition parameters on piezoelectric and mechanical properties of AlN thin films
A. Ababneh, U. Schmid, J. Hernando et al. · Materials Science and Engineering B · 2010 · 192 citations
Materials Science, Aluminium Nitride, Sputter Deposition Parameters +10
Control of preferential orientation of AlN films prepared by the reactive sputtering method
Masatou Ishihara, S.J Li, Hisami Yumoto et al. · Thin Solid Films · 1998 · 175 citations
Materials Science, Materials Engineering, Aluminium Nitride +9
Piezoelectric properties and residual stress of sputtered AlN thin films for MEMS applications
E. Iborra, J. Olivares, M. Clément et al. · Sensors and Actuators A Physical · 2004 · 113 citations
Materials Science, Aluminium Nitride, Engineering +10
Deposition and characterization of reactive magnetron sputtered aluminum nitride thin films for film bulk acoustic wave resonator
Kuan-Hsun Chiu, Jiann-Heng Chen, Hongren Chen et al. · Thin Solid Films · 2006 · 82 citations
Materials Science, Aluminium Nitride, Engineering +5