Effects of bottom electrodes on the orientation of AlN films and the frequency responses of resonators in AlN-based FBARs

Thin-film bulk acoustic resonators and filters using ZnO and lead-zirconium-titanate thin films

Q.X. Su, P. Kirby, E. Komuro et al. · IEEE Transactions on Microwave Theory and Techniques · 2001 · 158 citations

Natural Sciences, Materials Engineering, Materials Science +14

Materials for bulk acoustic wave (BAW) resonators and filters

H.P. Löbl, M. Klee, R.F. Milsom et al. · Journal of the European Ceramic Society · 2001 · 103 citations

Natural Sciences, Materials Engineering, Materials Science +12

Effect of input power on crystal orientation and residual stress in AlN film deposited by dc sputtering

Kazuya Kusaka, Daisuke Taniguchi, T. Hanabusa et al. · Vacuum · 2000 · 59 citations

Natural Sciences, Materials Engineering, Materials Science +16

Effect of substrate surface morphology and interface microstructure in ZnO thin films formed on various substrates

Y. Yoshino, K. Inoue, Masaru Takeuchi et al. · Vacuum · 2000 · 58 citations

Natural Sciences, Materials Engineering, Materials Science +17

Study of defects and interfaces in epitaxial ZnO films on (1120) Al2O3 grown by electron cyclotron resonance-assisted molecular beam epitaxy

Sung‐Hwan Lim, Daisuke Shindo, H.-B. Kang et al. · Journal of Crystal Growth · 2001 · 27 citations

Natural Sciences, Materials Engineering, Materials Science +12