Effects of bottom electrodes on the orientation of AlN films and the frequency responses of resonators in AlN-based FBARs - Concepedia

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Effects of bottom electrodes on the orientation of AlN films and the frequency responses of resonators in AlN-based FBARs

72

Citations

6

References

2004

Year

Jin-Bock Lee, Jun-Phil Jung, Myung-Ho Lee, Jin-Seok Park

Thin Solid Films

Materials ScienceAluminium NitrideElectrical EngineeringEngineeringNanoelectronicsAln-based FbarsApplied PhysicsBottom ElectrodesMicroelectronicsAln Films

References

	Year	Citations

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