Concepedia

The influence of sputter deposition parameters on piezoelectric and mechanical properties of AlN thin films

A. Ababneh, U. Schmid, J. Hernando, J. L. Sánchez-Rojas, H. Seidel

Materials Science and Engineering B · 2010 · 196 citations · 24 references

DOI

Concepts

References

24

The tension of metallic films deposited by electrolysis

G. Stoney · Proceedings of the Royal Society of London Series A Containing Papers of a Mathematical and Physical Character · 1909 · 4.8K citations · Full text

, , +11

Handbook of Thin Film Technology

L. I. Maissel, R. Glang, Paul P. Budenstein · Journal of The Electrochemical Society · 1971 · 2.8K citations

, , +12

Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings

John A. Thornton · Journal of Vacuum Science and Technology · 1974 · 2.3K citations

, , +17

Measurement of Strains at Si-SiO2 Interface

R. J. Jaccodine, William A. Schlegel · Journal of Applied Physics · 1966 · 403 citations

, , +17

Stress and piezoelectric properties of aluminum nitride thin films deposited onto metal electrodes by pulsed direct current reactive sputtering

M.-A. Dubois, Paul Muralt · Journal of Applied Physics · 2001 · 300 citations · Full text

, , +17