Piezoelectric properties and residual stress of sputtered AlN thin films for MEMS applications - Concepedia

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Piezoelectric properties and residual stress of sputtered AlN thin films for MEMS applications

113

Citations

19

References

2004

Year

E. Iborra, J. Olivares, M. Clément, L. Vergara, A. Sanz‐Hervás, J. Sangrador

Sensors and Actuators A Physical

Materials ScienceAluminium NitrideEngineeringMicrofabricationApplied PhysicsMems ApplicationsPiezoelectric PropertiesResidual StressPiezoelectric MaterialPiezoelectricityThin FilmsMicroelectronicsThin Film Processing

References

	Year	Citations

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