A. Sanz‐Hervás

Piezoelectric properties and residual stress of sputtered AlN thin films for MEMS applications

E. Iborra, J. Olivares, M. Clément et al. · Sensors and Actuators A Physical · 2004 · 113 citations

Materials Science, Aluminium Nitride, Engineering +10

Influence of sputtering mechanisms on the preferred orientation of aluminum nitride thin films

M. Clément, E. Iborra, J. Sangrador et al. · Journal of Applied Physics · 2003 · 101 citations

Materials Science, Materials Engineering, Rf Reactive Sputtering +13

SAW characteristics of AlN films sputtered on silicon substrates

M. Clément, L. Vergara, J. Sangrador et al. · Ultrasonics · 2004 · 98 citations

Materials Engineering, Materials Science, Aluminium Nitride +6

Degradation of the piezoelectric response of sputtered c-axis AlN thin films with traces of non-(0002) x-ray diffraction peaks

A. Sanz‐Hervás, M. Clément, E. Iborra et al. · Applied Physics Letters · 2006 · 89 citations

Materials Science, Aluminium Nitride, Optical Materials +15

Growth kinetics and morphology of high quality AlN grown on Si(111) by plasma-assisted molecular beam epitaxy

E. Calleja, M. A. Sánchez-Garcı́a, E. Monroy et al. · Journal of Applied Physics · 1997 · 68 citations

Materials Engineering, Materials Science, Aluminium Nitride +14