SAW characteristics of AlN films sputtered on silicon substrates - Concepedia

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SAW characteristics of AlN films sputtered on silicon substrates

98

Citations

10

References

2004

Year

M. Clément, L. Vergara, J. Sangrador, E. Iborra, A. Sanz‐Hervás

Materials EngineeringMaterials ScienceAluminium NitrideEngineeringSaw CharacteristicsSurface ScienceApplied PhysicsThin FilmsThin Film Processing

References

	Year	Citations

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