L. Vergara

Piezoelectric properties and residual stress of sputtered AlN thin films for MEMS applications

E. Iborra, J. Olivares, M. Clément et al. · Sensors and Actuators A Physical · 2004 · 116 citations

Natural Sciences, Materials Engineering, Materials Science +17

Influence of sputtering mechanisms on the preferred orientation of aluminum nitride thin films

M. Clément, E. Iborra, J. Sangrador et al. · Journal of Applied Physics · 2003 · 101 citations

Natural Sciences, Materials Engineering, Materials Science +14

SAW characteristics of AlN films sputtered on silicon substrates

M. Clément, L. Vergara, J. Sangrador et al. · Ultrasonics · 2004 · 98 citations

Engineering, Materials Engineering, Materials Science +16

Degradation of the piezoelectric response of sputtered c-axis AlN thin films with traces of non-(0002) x-ray diffraction peaks

A. Sanz‐Hervás, M. Clément, E. Iborra et al. · Applied Physics Letters · 2006 · 90 citations

Natural Sciences, Materials Engineering, Materials Science +17

Influence of oxygen and argon on the crystal quality and piezoelectric response of AlN sputtered thin films

L. Vergara, M. Clément, E. Iborra et al. · Diamond and Related Materials · 2003 · 62 citations

Natural Sciences, Materials Engineering, Materials Science +16