Concepedia

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Influence of oxygen and argon on the crystal quality and piezoelectric response of AlN sputtered thin films

DOI

62

Citations

7

References

2003

Year

L. Vergara, M. Clément, E. Iborra, A. Sanz‐Hervás, J. Garcı́a López, Yolanda Morilla, J. Sangrador, M.Á. Respaldiza
Diamond and Related Materials

References

YearCitations

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