Daniel Rosén

Dependence of the electromechanical coupling on the degree of orientation of c-textured thin AlN films

Johan Bjurström, Daniel Rosén, Ilia Katardjiev et al. · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 2004 · 66 citations

Aluminium Nitride, Engineering, Mechanical Engineering +19

TRIDYN simulation of target poisoning in reactive sputtering

Daniel Rosén, Ilia Katardjiev, S. Berg et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2004 · 35 citations

Engineering, Detonation Phenomenon, Target Fabrication +5

Aluminium nitride deposition on 4H-SiC by means of physical vapour deposition

Maciej Wolborski, Daniel Rosén, Anders Hallén et al. · Thin Solid Films · 2006 · 33 citations

Materials Science, Materials Engineering, Aluminium Nitride +9

Graded Al–AlN, TiN, and TiAlN multilayers deposited by radio-frequency reactive magnetron sputtering

A. Raveh, Malki Pinkas, Daniel Rosén et al. · Surface and Coatings Technology · 1999 · 32 citations

Materials Science, Aluminium Nitride, Engineering +5

Membrane covered electrically isolated through-wafer via holes

Daniel Rosén, Jörgen Olsson, Christer Hedlund · Journal of Micromechanics and Microengineering · 2001 · 12 citations

Engineering, Porous Membrane, Integrated Circuits +19