Maciej Wolborski

Characterization of HfO2 films deposited on 4H-SiC by atomic layer deposition

Maciej Wolborski, Mårten Rooth, Mietek Bakowski et al. · Journal of Applied Physics · 2007 · 35 citations

Engineering, Hfo2 Layers, Silicon On Insulator +19

Aluminium nitride deposition on 4H-SiC by means of physical vapour deposition

Maciej Wolborski, Daniel Rosén, Anders Hallén et al. · Thin Solid Films · 2006 · 33 citations

Materials Science, Materials Engineering, Aluminium Nitride +9

Characterisation of the Al2O3 films deposited by ultrasonic spray pyrolysis and atomic layer deposition methods for passivation of 4H–SiC devices

Maciej Wolborski, Mietek Bakowski, A. Ortíz et al. · Microelectronics Reliability · 2005 · 30 citations

Materials Engineering, Materials Science, Engineering +8

Characterization of Aluminium and Titanium Oxides Deposited on 4H-SiC by Atomic Layer Deposition Technique

Maciej Wolborski, Mietek Bakowski, Viljami Pore et al. · Materials science forum · 2005 · 14 citations

Engineering, Titanium Oxides Deposited, Semiconductor Device +18

Crystalline quality of 3C-SiC formed by high-fluence C+-implanted Si

S. Intarasiri, Anders Hallén, Jun Lu et al. · Applied Surface Science · 2006 · 13 citations

Materials Science, Crystalline Quality, Materials Engineering +5