Aluminium nitride deposition on 4H-SiC by means of physical vapour deposition

Electrical characterization of aln mis and mim structures

F. Engelmark, Jörgen Westlinder, G.F. Iriarte et al. · IEEE Transactions on Electron Devices · 2003 · 62 citations

Aluminium Nitride, Engineering, Aluminum Nitride +17

Synthesis of aluminum nitride monocrystals

J. A. Kohn, Perry G. Cotter, R.A. Potter · American Mineralogist · 1956 · 40 citations

Materials Science, Materials Engineering, Aluminium Nitride +5

Phase Formation Sequence of Nickel Silicides from Rapid Thermal Annealing of Ni on 4H-SiC

Lynnette D. Madsen, Erik B. Svedberg, Henry H. Radamson et al. · Materials science forum · 1998 · 15 citations

Materials Science, Materials Engineering, Engineering +9