Control of preferential orientation of AlN films prepared by the reactive sputtering method - Concepedia

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Control of preferential orientation of AlN films prepared by the reactive sputtering method

175

Citations

5

References

1998

Year

Masatou Ishihara, S.J Li, Hisami Yumoto, Kazuo Akashi, Yukio Ide

Thin Solid Films

Materials ScienceMaterials EngineeringAluminium NitrideEngineeringSurface ScienceApplied PhysicsPreferential OrientationReactive Sputtering MethodChemical DepositionThin Film ProcessingAln FilmsAnodizing

References

	Year	Citations

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