Growth and characterization of aluminum nitride coatings prepared by pulsed-direct current reactive unbalanced magnetron sputtering - Concepedia

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Growth and characterization of aluminum nitride coatings prepared by pulsed-direct current reactive unbalanced magnetron sputtering

72

Citations

37

References

2007

Year

Harish C. Barshilia, B. Deepthi, K.S. Rajam

Thin Solid Films

Materials ScienceMaterials EngineeringElectrical EngineeringAluminium NitrideEngineeringThermal Spray CoatingCorrosionSurface ScienceApplied PhysicsPulsed-direct Current ReactiveChemical DepositionAnodizingMicrostructureAluminum Nitride Coatings

References

	Year	Citations

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