Publication | Closed Access
Gas sensing properties of epitaxial SnO2 thin films prepared by atomic layer deposition
89
Citations
17
References
2003
Year
Materials ScienceEngineeringNanotechnologyGas SensorSurface ScienceApplied PhysicsOxide ElectronicsThin FilmsAtomic Layer DepositionElectrochemical Gas SensorThin Film Processing
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