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Poly SiGe, a promising material for MEMS monolithic integration with the driving electronics

Electrical EngineeringWafer Scale ProcessingEngineeringAdvanced Packaging (Semiconductors)Device IntegrationMicrofabricationDriving ElectronicsElectronic PackagingMems Monolithic IntegrationMicroelectronicsPoly SigeMicro-electromechanical System