A surface micromachined capacitive absolute pressure sensor array on a glass substrate

Capacitive sensors: When and how to use them

Robert Puers · Sensors and Actuators A Physical · 1993 · 327 citations · Full text

Engineering, Materials Engineering, Materials Science +12

Pressure sensitivity in anisotropically etched thin-diaphragm pressure sensors

Samuel Kelly Clark, K.D. Wise · IEEE Transactions on Electron Devices · 1979 · 299 citations

Engineering, Materials Engineering, Mechanical Engineering +17

A batch-fabricated silicon capacitive pressure transducer with low temperature sensitivity

Y. S. Lee, K.D. Wise · IEEE Transactions on Electron Devices · 1982 · 217 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

Fabrication of micromechanical devices from polysilicon films with smooth surfaces

H. Guckel, J.J. Sniegowski, Todd R. Christenson et al. · Sensors and Actuators · 1989 · 176 citations

Engineering, Materials Engineering, Materials Science +13

Scaling limits in batch-fabricated silicon pressure sensors

Hin-Leung Chau, K.D. Wise · IEEE Transactions on Electron Devices · 1987 · 162 citations

Engineering, Materials Engineering, Materials Science +17