Thin Solid Films · 2003 · 12 citations · 3 references
EngineeringElectrical EngineeringPhysicsMicroelectronicsSemiconductor DevicesSemiconductor MaterialsComplementary Metal-oxide-semiconductor TechnologyDevice CharacterizationIon ImplantationMetal-oxide-semiconductor Field-effect TransistorsSemiconductor Device MaterialsSemiconductor InterfacesGate Dielectric EngineeringGate DielectricsGate Leakage CurrentGate Oxide DegradationGate Oxide InterfacesGate Oxide Thickness EffectsGate Oxides
3
Electron and hole trapping in doped oxides
W. L. Warren, M.R. Shaneyfelt, Daniel M. Fleetwood et al. · IEEE Transactions on Nuclear Science · 1995 · 34 citations