Silicon nitride cantilever array integrated with silicon heaters and piezoelectric detectors for probe-based data storage

The "millipede" - nanotechnology entering data storage

P. Vettiger, Graham L. W. Cross, M. Despont et al. · IEEE Transactions on Nanotechnology · 2002 · 742 citations

Engineering, Materials Engineering, Materials Science +14

Micromachined piezoelectric force sensors based on PZT thin films

Chengkuo Lee, Toshihiro Itoh, Tadatomo Suga · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 1996 · 93 citations

Engineering, Materials Engineering, Materials Science +17

PZT cantilever array integrated with piezoresistor sensor for high speed parallel operation of AFM

Youngsik Kim, Hyo‐Jin Nam, Seong-Moon Cho et al. · Sensors and Actuators A Physical · 2002 · 55 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +16

Silicon nitride cantilevers with oxidation-sharpened silicon tips for atomic force microscopy

Randal J. Grow, S. C. Minne, Scott R. Manalis et al. · Journal of Microelectromechanical Systems · 2002 · 54 citations

Natural Sciences, Materials Engineering, Materials Science +17

Microcantilevers integrated with heaters and piezoelectric detectors for nano data-storage application

Caroline Sunyong Lee, Hyo‐Jin Nam, Young Sik Kim et al. · Applied Physics Letters · 2003 · 46 citations · Full text

Engineering, Materials Engineering, Materials Science +16