A surface-tension driven micropump for low-voltage and low-power operations

Kwang‐Seok Yun, Il‐Joo Cho, Jong‐Uk Bu, +2

Journal of Microelectromechanical Systems

Electrical EngineeringEngineeringSoft RoboticsFlexible ElectronicsMicrofabrication +10

Design, fabrication and RF performances of two different types of piezoelectrically actuated Ohmic MEMS switches

Hee Chul Lee, Jae‐Hyoung Park, Jaeyeong Park, +2

Journal of Micromechanics and Microengineering

EngineeringOhmic Mems SwitchesRf PerformancesMicroactuatorDifferent Types +15

Piezoelectrically actuated RF MEMS DC contact switches with low voltage operation

Hee Chul Lee, Jaeyeong Park, Jong‐Uk Bu

IEEE Microwave and Wireless Components Letters

Integrated Radio FrequencyElectrical EngineeringEnergy HarvestingEngineeringMicrofabrication +13

Electromagnetic biaxial microscanner with mechanical amplification at resonance

Ah Ran Cho, Aleum Han, Suna Ju, +5

Optics Express

PhotonicsMagnetismEngineeringMicrofabricationBiomedical Imaging +11

A fully wafer-level packaged RF MEMS switch with low actuation voltage using a piezoelectric actuator

Jae Hyoung Park, Hee Chul Lee, Yong‐Hee Park, +4

Journal of Micromechanics and Microengineering

EngineeringMicroelectromechanical SystemsIntegrated CircuitsMicroactuatorInterconnect (Integrated Circuits) +17

Contact materials and reliability for high power RF-MEMS switches

Hyouk Kwon, Dong-June Choi, Jae‐Hyoung Park, +6

Materials ScienceElectrical Contact BehaviorElectrical EngineeringMems SwitchesEngineering +12

Micromachined RF MEMS tunable capacitors using piezoelectric actuators

J.Y. Park, Y. Yee, Hong-Su Nam, +1

Electrical EngineeringEngineeringMicromachinesMicrofabricationRadio Frequency Micro-electromechanical Systems +8

Electromagnetic Two-Dimensional Scanner Using Radial Magnetic Field

Chang‐Hyeon Ji, Moongoo Choi, Sang-Cheon Kim, +3

Journal of Microelectromechanical Systems

MagnetismEngineeringMicrofabricationMagnetic SensorMagnetic Resonance +12

Microcantilevers integrated with heaters and piezoelectric detectors for nano data-storage application

Caroline Sunyong Lee, Hyo‐Jin Nam, Young Sik Kim, +3

Applied Physics Letters

EngineeringMicroelectromechanical SystemsPiezoelectric CantileverPiezoelectric DetectorsBiomedical Engineering +17

Electrostatic MEMS Variable Optical Attenuator With Rotating Folded Micromirror

Tsong‐Shin Lim, Chang‐Hyeon Ji, C.-H. Oh, +3

IEEE Journal of Selected Topics in Quantum Electronics

Optical MaterialsEngineeringMechanical EngineeringBiomedical EngineeringMicroactuator +15