On the influence of vacuum on the design and characterization of MEMS

Modern Control Engineering

K. Ogata, J. W. Brewer · Journal of Dynamic Systems Measurement and Control · 1971 · 6.3K citations · Full text

Engineering, Electrical Engineering, Mechanical Engineering +17

Equivalent-circuit model of the squeezed gas film in a silicon accelerometer

Timo Veijola, Heikki Kuisma, Juha Lahdenperä et al. · Sensors and Actuators A Physical · 1995 · 463 citations

Engineering, Electrical Engineering, Physics +16

On Isothermal Squeeze Films

J. J. Blech · Journal of Lubrication Technology · 1983 · 359 citations

Natural Sciences, Materials Science, Electronic Materials +9

Resonant silicon sensors

Göran Stemme · Journal of Micromechanics and Microengineering · 1991 · 289 citations

Engineering, Materials Engineering, Materials Science +17

Compact damping models for laterally moving microstructures with gas-rarefaction effects

Timo Veijola, Marek Turowski · Journal of Microelectromechanical Systems · 2001 · 138 citations

Engineering, Mechanical Engineering, Computational Fluid Dynamics +15