Marco Dienel

Bonding and deep RIE: a powerful combination for high-aspect-ratio sensors and actuators

Karla Hiller, Matthias Kuechler, Detlef Billep et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 47 citations

Engineering, Materials Engineering, Materials Science +17

On the influence of vacuum on the design and characterization of MEMS

Marco Dienel, Michael Naumann, A. Sorger et al. · Vacuum · 2011 · 24 citations

Engineering, Electrical Engineering, Physics +10

SystemC-AMS Assisted Design of an Inertial Navigation System

Erik Markert, Marco Dienel, Goeran Herrmann et al. · IEEE Sensors Journal · 2007 · 18 citations

Engineering, Robotics Engineering, Systems Engineering +16

Modeling of a new 2D Acceleration Sensor Array using SystemC-AMS

Erik Markert, Marco Dienel, Goeran Herrmann et al. · Journal of Physics Conference Series · 2006 · 11 citations · Full text

Engineering, Electrical Engineering, Systems Engineering +17

Design, modeling, fabrication and characterization of a MEMS acceleration sensor for acoustic emission testing

A. Sorger, Christian Auerswald, Alexey Shaporin et al. · 2013 · 10 citations

Engineering, Electrical Engineering, Mechanical Engineering +17