Concepedia

Karla Hiller

KH

29

Publications

531

Citations

14

H-Index

1999

Active since

Affiliations

Chemnitz University of Technology(Current)

Fraunhofer Institute for Electronic Nano Systems

InfraTec (Germany)

Institute of Semiconductor Physics

Fraunhofer Institute for Reliability and Microintegration

Karla Hiller is an author at Chemnitz University of Technology specializing in engineering, applied physics, and microfabrication.

ORCID

Top concepts

Publications per year

1999–2022

29

Publications

29

Bonding and deep RIE: a powerful combination for high-aspect-ratio sensors and actuators

Karla Hiller, Matthias Kuechler, Detlef Billep et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 47 citations

Tunable infrared detector with integrated micromachined Fabry-Perot filter

Norbert Neumann, Martin Ebermann, Karla Hiller et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 35 citations

, , +13

2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride

Katja Meinel, Marcel Melzer, Chris Stoeckel et al. · Sensors · 2020 · 35 citations · Full text

Piezoelectric Scanning Micromirror With Built-In Sensors Based on Thin Film Aluminum Nitride

Katja Meinel, Chris Stoeckel, Marcel Melzer et al. · IEEE Sensors Journal · 2020 · 34 citations

, , +18

Polymer lab-on-chip systems with integrated electrochemical pumps suitable for large-scale fabrication

J. Nestler, Andreas Morschhauser, Karla Hiller et al. · The International Journal of Advanced Manufacturing Technology · 2009 · 33 citations

, , +10

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