Karla Hiller - Concepedia

Author

Karla Hiller

Chemnitz University of Technology ORCID

Also Known As

Franz Tank, Hiller, K., Hiller, Karla, K Hiller, K. HILLER, K. Hiller, Karla Hiller

166

Publications

960

Citations

H-Index

Concepts

All Affiliations

Chemnitz University of Technology Fraunhofer Institute for Electronic Nano Systems InfraTec (Germany)Institute of Semiconductor Physics Fraunhofer Institute for Reliability and Microintegration

About

Karla Hiller is an author at Chemnitz University of Technology specializing in engineering, applied physics, and microfabrication.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	11	13	248
2	Applied Physics	9	9	171
3	Natural Sciences	1	1	15
4	Biomedical Engineering	1	1	11
5	Chemistry	1	1	15

Karla Hiller

Publications

531

Citations

H-Index

Page 1

	Year	Citations
Bonding and deep RIE: a powerful combination for high-aspect-ratio sensors and actuators Karla Hiller, Matthias Kuechler, Detlef Billep, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE	2005	47
Tunable infrared detector with integrated micromachined Fabry-Perot filter Norbert Neumann, Martin Ebermann, Karla Hiller, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE PhotonicsOptical MaterialsGas AnalysisEngineeringInfrared Sensor	2007	35
2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride Katja Meinel, Marcel Melzer, Chris Stoeckel, Sensors	2020	35
Piezoelectric Scanning Micromirror With Built-In Sensors Based on Thin Film Aluminum Nitride Katja Meinel, Chris Stoeckel, Marcel Melzer, IEEE Sensors Journal EngineeringMicroactuatorSensor TechnologyMicro-electromechanical SystemV Actuation Voltage	2020	34
Polymer lab-on-chip systems with integrated electrochemical pumps suitable for large-scale fabrication J. Nestler, Andreas Morschhauser, Karla Hiller, The International Journal of Advanced Manufacturing Technology Large-scale FabricationElectroactive MaterialElectrical EngineeringEngineeringMicrofabrication	2009	33
The Limits of the Post‐Growth Optimization of AlN Thin Films Grown on Si(111) via Magnetron Sputtering Dmytro Solonenko, Constance Schmidt, Chris Stoeckel, physica status solidi (b) Materials ScienceAluminium NitridePost‐growth OptimizationEngineeringCrystalline Defects	2019	26
Widely tunable Fabry-Perot filter based MWIR and LWIR microspectrometers Martin Ebermann, Norbert Neumann, Karla Hiller, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE	2012	25
Recent advances in expanding the spectral range of MEMS Fabry-Perot filters Martin Ebermann, Norbert Neumann, Karla Hiller, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE	2010	21
Infrared spectroscopy of bonded silicon wafers A. G. Milekhin, Cameliu Himcinschi, M. Friedrich, Semiconductors	2006	20
Dual-band MEMS Fabry-Pérot filter with two movable reflectors for mid- and long-wave infrared microspectrometers Marco Meinig, Martin Ebermann, Norbert Neumann, PhotonicsSensor TechnologyFast Microspectrometer ModuleEngineeringMicrofabrication	2011	19

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