Concepedia

Alexey Shaporin

AS

Statistics

Publications

7

Citations

152

H-Index

7

Active since

2006

Affiliations

Chemnitz University of Technology(Current)

Fraunhofer Institute for Electronic Nano Systems

Alexey Shaporin is an author at Chemnitz University of Technology specializing in mechanical engineering, engineering, and microfabrication.

Top concepts

EngineeringMicroelectronicsMicrofabricationElectrical EngineeringMechanical EngineeringEducationMeasurementHeat TransferApplied PhysicsInstrumentation

Publications per year

2006–2021

7

Publications

7

Field enhancement factor for an array of MWNTs in CNT paste

A.S. Berdinsky, Alexey Shaporin, Ji‐Beom Yoo et al. · Applied Physics A · 2006 · 40 citations

Field Enhancement Factor, Cnt Paste

2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride

Katja Meinel, Marcel Melzer, Chris Stoeckel et al. · Sensors · 2020 · 35 citations · Full text

Determination of Parameters With Uncertainties for Quality Control in MEMS Fabrication

Marc Gennat, Marco Meinig, Alexey Shaporin et al. · Journal of Microelectromechanical Systems · 2013 · 27 citations

Engineering, Measurement, Mechanical Engineering +18

North finding with a single double mass MEMS gyroscope- A performance demonstrator

Daniel Bülz, Roman Forke, Karla Hiller et al. · 2021 · 16 citations

Numerical characterization and experimental verification of an in-plane MEMS-actuator with thin-film aluminum heater

Peter Meszmer, Karla Hiller, Steffen Hartmann et al. · Microsystem Technologies · 2014 · 14 citations

Electrical Engineering, Engineering, Microfabrication +11

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